Chemical trade name: SU-8 Developer
Manufacturer: Kayaku Advanced Materrials, Inc. . (formerly MicroChem)
1-METHOXY-2-PROPYL acetate (CAS: 108-65-6) , > 99.5% propylene glycol methyl ether acetate (CU)
2-methoxy-1-propyl acetate < 0.5% 2-methylpropanol acetate < 0.5%
How it works:
The developing principle of SU-8 is to dissolve the unexposed photoresist in the developing solution. When the substrate is placed in the Developer, the unexposed photoresist is dissolved in the Developer. The exposed photoresist has been cross-linked to form a polymer network, so the Developer has no dissolution of it, forming the opposite of the mask microstructure pattern.
User suggestions for laboratories:
Please develop in the fume hood. Suppose a user develops a 4-inch silicon wafer， he can fill the Developer into a 6-inch glass petri dish to submerge the wafer. The Developer can be drawn from the culture dish with the needle tube and slowly push the syringe to make the developer flow in the culture dish, add block development. When you look at the surface of the wafer, you can see that the reflection on the bottom of the wafer indicates the end of development. Remove the developed silicon wafer and observe under yellow light. If there is color reflection, you can use a new syringe (remove the needle) to extract the new developer solution and spray it on the surface of the wafer to wash it. Then rinse with deionized water and blow dry with nitrogen.
If the user has a developing machine, you can operate according to the developing machine manual.
Organic solvent solution
Propylene glycol monomethyl ether acetate
|Vapour pressure:||3.7 mm Hg @ 20° C (68° F)|
|% volatile:||100% by wt|
|Evaporation rate:||0.39 (BuAc=1)|
|Autoignition temp:||354° C (670° F)|
|Explosion Limits:||Lower: 1.3%|
|Boiling point:||150° C (302° F)|
|Appearance:||Viscous pale yellow to yellow liquid|